In situprobing of surface hydrides on hydrogenated amorphous silicon using attenuated total reflection infrared spectroscopy
نویسندگان
چکیده
منابع مشابه
Single-reflection attenuated total reflection of organic monolayers on silicon.
Attenuated total re ection (ATR) spectroscopy, a wellknown surface technique, is frequently used for examining very thin lms on substrates. However, when it comes to examining thin lms on silicon substrates, the high refractive index of the substrates seems to preclude ATR analysis. This paper demonstrates that extraordinary sensitivity can be achieved by using ATR to analyze monolayers on...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
سال: 2002
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.1469012